Gas Proportioning and Regulation:

Inspection Details: Check whether the ratio of various gases meets process requirements and ensure the gas supply system is accurate and functioning correctly.

Operational Procedure: Check gas flow meters, regulating valves, and pressure control systems, and adjust the flow ratios of various gases.

Frequency: Perform adjustments and calibrations monthly.

Reactor Gas Supply System Maintenance:

Inspection Details: Ensure the stability of the gas supply system to prevent gas fluctuations from affecting the reaction process.

Operational Procedure: Check gas flow and pressure, clean gas supply piping, and check the accuracy of regulating valves and pressure gauges.

Frequency: Perform inspections every two weeks.

Equipment Safety Inspection and Training:

Inspection Details: Ensure that the equipment is in safe condition and that operators understand and adhere to safety operating procedures.

Operational Procedure: Check equipment safety valves, pressure relief devices, etc., and provide regular safety training to operators.

Frequency: Perform a comprehensive inspection every six months and conduct regular safety training.

Air Quality Testing:

Inspection Content: Check that air quality complies with ISO 8573 standards to prevent moisture, oil, and vapor in the air from affecting production.

Operational Procedure: Use specialized equipment to detect particulate matter and oil and vapor levels in the air, and clean or replace as necessary.

Frequency: Perform air quality testing monthly.