Gas Proportioning and Regulation.

Inspection Details: Check whether the ratio of various gases meets process requirements and ensure the gas supply system is accurate and functioning Check whether the ratio of various gases meets process requirements and ensure the gas supply system is accurate and functioning correctly.

Operational Procedure: Check gas flow meters, regulating valves, and pressure control systems, and adjust the flow ratios of various gases.

Frequency: Perform adjustments and calibrations monthly.

Reactor Gas Supply System Maintenance.

Inspection Details: Ensure the stability of the gas supply system to prevent gas fluctuations from affecting the reaction process.

Operational Procedure: Check gas flow and pressure, clean gas supply piping, and check the accuracy of regulating valves and pressure gauges.

Frequency: Perform inspections every two weeks.

Equipment Safety Inspection and Training.

Inspection Details: Ensure that the equipment is in safe condition and that operators understand and adhere to safety operating procedures.

Operational Procedure: Check equipment safety valves, pressure relief devices, etc., and provide regular safety training to operators.

Frequency: Perform a comprehensive inspection every six months and conduct regular safety training.

Air Quality Testing.

Inspection Content: Check that air quality complies with ISO 8573 standards to prevent moisture, oil, and vapor in the air from affecting production.

Operational Procedure: Use specialized equipment to detect particulate matter and oil and vapor levels in the air, and clean or replace as necessary.

Frequency: Perform air quality testing monthly.